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| Innovating Gas Processing Technology and Reinforcing Security Measures |
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Recently manufactured LSI circuits require a 0.13-micron* machining technique. This high-precision process requires the use of a gas dry-etching technique and a filmforming technique. Because some of the gases used in this process have toxic, corrosive or flammable properties, safety measures are a top priority for us.
* Minimum machining dimension of an IC. 1 micron is one thousandth of 1 mm. |
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| The cylinder cabinet is equipped with multiplesensors |
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| Total Safety Control and Harmless Exhaust |
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Keeping in mind the fact that “mistakes do happen” and “all machines eventually deteriorate,” we set up a system of gas safety measures. This system allows all information, from supply to exhaust, to be centrally monitored.
This fail-safe system monitors the gas supply, consumption and exhaust for all facilities in order to prevent accidents if an operational mistake or malfunction should occur.
In the gas supply system for example, sensors that detect irregularities are mounted on the cylinder cabinets to monitor gas leaks, fires, etc. The system is also equipped with an interlocking function (automatic shutdown valve) to stop gas supply in case of disasters, accidents or malfunctions.
Residual gas is detoxified and exhausted. This system complies to Sharp safety measure standards. |
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| Safety: An Activity Created and Supported by All |
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Sharp promotes safety from both personnel and organizational aspects so that all employees can support gas safety measures. We invite an outside specialist to give lectures at a safety education class held for all employees, not just the staff members who work with gases.
Some 160 employees from the Fukuyama site attend the seminar annually, and more than 2,000 people have finished the course.
Certified personnel are allowed to supervise cylinder-replacement work that requires manual handling.
* Cylinder replacement is performed by specialized subcontractor. Our employees only supervise the work. |
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